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Title:An air-gapped cavity filter based on MEMS process for 5G millimeter wave applications
Authors:ID Ding, Yan (Author)
ID Ding, Jian (Author)
ID Fan, Xing (Author)
ID Wang, Jiayi (Author)
ID Yang, Yunchun (Author)
Files:.pdf PDF - Presentation file, download (1,06 MB)
MD5: 87F61AE39B835CA036093A2F68986591
 
URL URL - Source URL, visit https://ojs.midem-drustvo.si/index.php/InfMIDEM/article/view/2119
 
URL URL - Source URL, visit https://ojs.midem-drustvo.si/index.php/InfMIDEM/article/view/2119
 
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Language:English
Typology:1.01 - Original Scientific Article
Organization:Logo MIDEM - Society for Microelectronics, Electronic Components and Materials
Abstract:This article presents a 5G millimeter Wave bandpass filter using air-gapped structure, which is fabricated through highprecision micro electromechanical system (MEMS) process. The grounded and open stub lines, as well as impedance transformation stub lines, which generating four transmission poles (TPs) and two transmission zeros (TZs), are proposed to achieve the design goal. Four TPs support a 24.25-27.5-GHz passband, while two TZs provide a sharp out-of-band rejection. Step-to-step design process is given to guide the 24.25-27.5-GHz bandpass filter design. The 24.25-27.5-GHz bandpass filter is fabricated and measured, which has a minimum insertion loss of 0.9dB within the passband.
Keywords:millimeter wave, bandpass filter, micro electromechanical system (MEMS), insertion loss
Publication status:Published
Publication version:Version of Record
Publication date:01.01.2025
Year of publishing:2025
Number of pages:str. 167-172
Numbering:Vol. 55, no. 3
PID:20.500.12556/DiRROS-30238 New window
UDC:621.38
ISSN on article:0352-9045
DOI:10.33180/InfMIDEM2025.303 New window
COBISS.SI-ID:281493251 New window
Note:Besedilo v angl.;
Publication date in DiRROS:18.06.2026
Views:249
Downloads:317
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Record is a part of a journal

Title:Informacije MIDEM : časopis za mikroelektroniko, elektronske sestavne dele in materiale
Shortened title:Inf. MIDEM
Publisher:Strokovno društvo za mikroelektroniko, elektronske sestavne dele in materiale
ISSN:0352-9045
COBISS.SI-ID:1220612 New window

Document is financed by a project

Funder:Natural Science Foundation of Hebei Province, China
Project number:F2025508015
Funder:Fundamental Research Funds for the Central Universities
Project number:3142025013
Funder:Fundamental Research Funds for the Central Universities
Project number:3142023023
Funder:Science and Technology Support Project of Langfang, China
Project number:2025011037

Licences

License:CC BY 4.0, Creative Commons Attribution 4.0 International
Link:http://creativecommons.org/licenses/by/4.0/
Description:This is the standard Creative Commons license that gives others maximum freedom to do what they want with the work as long as they credit the author.

Secondary language

Language:Slovenian
Title:Zračni votlinski filter na MEMS osnovi za 5G aplikacije
Abstract:V članku je predstavljen pasovni filter 5G za milimetrske valove, ki uporablja strukturo z zračnimi kapami in je izdelan z visoko natančnim postopkom mikroelektromehanskega sistema (MEMS). Za dosego cilja zasnove so predlagani ozemljeni in odprti kraki ter kraki s transformacijo impedance, ki ustvarjajo štiri prenosne pole (TP) in dve prenosni ničli (TZ). Štirje TP podpirajo prepustni pas 24,25- 27,5 GHz, dva TZ pa zagotavljata zavrnitev izven frekvenčnega pasu. Podan je postopek načrtovanja 24,25-27,5-GHz prepustnega pasu. Izdelan in izmerjen je 24,25-27,5-GHz pasovni filter, ki ima najmanjšo izgubo 0,9 dB znotraj prepustnega pasu.
Keywords:milimetrsko valovanje, pasovni filter, mikroelektromehanski sistem (MEMS), vložna izguba


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This document is a part of these collections:
  1. Informacije MIDEM

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