20.500.12556/DiRROS-30238 An air-gapped cavity filter based on MEMS process for 5G millimeter wave applications Zračni votlinski filter na MEMS osnovi za 5G aplikacije This article presents a 5G millimeter Wave bandpass filter using air-gapped structure, which is fabricated through highprecision micro electromechanical system (MEMS) process. The grounded and open stub lines, as well as impedance transformation stub lines, which generating four transmission poles (TPs) and two transmission zeros (TZs), are proposed to achieve the design goal. Four TPs support a 24.25-27.5-GHz passband, while two TZs provide a sharp out-of-band rejection. Step-to-step design process is given to guide the 24.25-27.5-GHz bandpass filter design. The 24.25-27.5-GHz bandpass filter is fabricated and measured, which has a minimum insertion loss of 0.9dB within the passband. V članku je predstavljen pasovni filter 5G za milimetrske valove, ki uporablja strukturo z zračnimi kapami in je izdelan z visoko natančnim postopkom mikroelektromehanskega sistema (MEMS). Za dosego cilja zasnove so predlagani ozemljeni in odprti kraki ter kraki s transformacijo impedance, ki ustvarjajo štiri prenosne pole (TP) in dve prenosni ničli (TZ). Štirje TP podpirajo prepustni pas 24,25- 27,5 GHz, dva TZ pa zagotavljata zavrnitev izven frekvenčnega pasu. Podan je postopek načrtovanja 24,25-27,5-GHz prepustnega pasu. Izdelan in izmerjen je 24,25-27,5-GHz pasovni filter, ki ima najmanjšo izgubo 0,9 dB znotraj prepustnega pasu. millimeter wave bandpass filter micro electromechanical system (MEMS) insertion loss milimetrsko valovanje pasovni filter mikroelektromehanski sistem (MEMS) vložna izguba true false false Angleški jezik Slovenski jezik Neznano 2026-06-17 19:13:40 2026-06-18 06:00:16 2026-06-19 03:51:51 0000-00-00 00:00:00 2025 0 0 Besedilo v angl.; str. 167-172 no. 3 Vol. 55 2025 0000-00-00 NiDoloceno NiDoloceno NiDoloceno 0000-00-00 0000-00-00 2025-01-01 621.38 0352-9045 10.33180/InfMIDEM2025.303 281493251 https://ojs.midem-drustvo.si/index.php/InfMIDEM/article/view/2119 1 e332f0ae-6a6f-11f1-97b2-001a4af901a5 https://dirros.openscience.si/Dokument.php?lang=slv&id=45808 https://ojs.midem-drustvo.si/index.php/InfMIDEM/article/view/2119 1 380120d5-6aca-11f1-a3b9-001a4af901a5 https://dirros.openscience.si/Dokument.php?lang=slv&id=45836 Strokovno društvo za mikroelektroniko, elektronske sestavne dele in materiale 0 0 0