AFM study of roughness development during ToF-SIMS depth profiling of multilayers with a ▫$Cs^+$▫ ion beam in a ▫$H_2$▫ atmosphere

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Title:	AFM study of roughness development during ToF-SIMS depth profiling of multilayers with a ▫$Cs^+$▫ ion beam in a ▫$H_2$▫ atmosphere
Authors:	ID Ekar, Jernej, Institut Jožef Stefan (Author) ID Kovač, Janez, Institut Jožef Stefan (Author)
Files:	URL - Source URL, visit https://pubs.acs.org/doi/10.1021/acs.langmuir.2c01837 PDF - Presentation file, download (5,77 MB) MD5: 517BD00514FFA332B779285C11855CD6
Language:	English
Typology:	1.01 - Original Scientific Article
Organization:	IJS - Jožef Stefan Institute
Publication status:	Published
Publication version:	Version of Record
Submitted for review:	13.07.2023
Publication date:	14.10.2022
Publisher:	ACS Publications
Year of publishing:	2022
Number of pages:	str. 12871–12880
Numbering:	Vol. 38, no. 42
Source:	ZDA
PID:	20.500.12556/DiRROS-17172
UDC:	53
ISSN on article:	0743-7463
DOI:	10.1021/acs.langmuir.2c01837
COBISS.SI-ID:	128549635
Copyright:	© 2022 The Authors
Publication date in DiRROS:	18.10.2023
Views:	912
Downloads:	322
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Funder:	ARRS - Slovenian Research Agency
Project number:	P2-0082
Name:	Tankoplastne strukture in plazemsko inženirstvo površin

License:	CC BY 4.0, Creative Commons Attribution 4.0 International

Link:	http://creativecommons.org/licenses/by/4.0/
Description:	This is the standard Creative Commons license that gives others maximum freedom to do what they want with the work as long as they credit the author.
Licensing start date:	14.10.2022

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