| Title: | Oxygen atom density in a large reactor powered by four inductively coupled plasma sources |
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| Authors: | ID Primc, Gregor, Institut "Jožef Stefan" (Author)
ID Lojen, Dane, Institut "Jožef Stefan" (Author)
ID Vesel, Alenka, Institut "Jožef Stefan" (Author)
ID Mozetič, Miran, Institut "Jožef Stefan" (Author)
ID Zaplotnik, Rok, Institut "Jožef Stefan" (Author) |
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| Files: |  PDF - Presentation file, download (3,60 MB)
MD5: 571A9EB67A6F3D69797F82D56B821641
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| Language: | English |
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| Typology: | 1.01 - Original Scientific Article |
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| Organization: |  IJS - Jožef Stefan Institute
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| Publication status: | Published |
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| Publication version: | Version of Record |
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| Submitted for review: | 08.12.2021 |
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| Article acceptance date: | 17.02.2022 |
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| Publication date: | 22.02.2022 |
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| Publisher: | Elsevier |
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| Year of publishing: | 2022 |
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| Number of pages: | str. 110964-1-110964-7 |
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| Numbering: | Vol. 199 |
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| Source: | Nizozemska |
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| PID: | 20.500.12556/DiRROS-24042  |
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| UDC: | 533 |
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| ISSN on article: | 0042-207X |
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| DOI: | 10.1016/j.vacuum.2022.110964 |
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| COBISS.SI-ID: | 99387395 |
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| Copyright: | © 2022 The Authors. |
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| Publication date in DiRROS: | 10.11.2025 |
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| Views: | 139 |
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| Downloads: | 49 |
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| Metadata: |    |
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