| Title: | ToF-SIMS depth profiling of metal, metal oxide, and alloy multilayers in atmospheres of ▫$H_2$▫, ▫$C_2H_2$▫, CO, and ▫$O_2$▫ |
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| Authors: | ID Ekar, Jernej, Institut Jožef Stefan (Author)
ID Panjan, Peter, Institut Jožef Stefan (Author)
ID Drev, Sandra, Institut Jožef Stefan (Author)
ID Kovač, Janez, Institut Jožef Stefan (Author) |
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| Files: |  URL - Source URL, visit https://pubs.acs.org/doi/10.1021/jasms.1c00218
 PDF - Presentation file, download (8,02 MB)
MD5: 75B7F70979A15EEBC1F812F59A1C3053
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| Language: | English |
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| Typology: | 1.01 - Original Scientific Article |
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| Organization: |  IJS - Jožef Stefan Institute
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| Keywords: | Ions, Layers, Mass spectrometry, Metals, Oxides, SIMS depth profiling H2 C2H2 CO and O2 atmosphere gas flooding cluster secondary ions matrix effect |
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| Publication status: | Published |
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| Publication version: | Version of Record |
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| Submitted for review: | 15.07.2021 |
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| Article acceptance date: | 13.12.2021 |
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| Publication date: | 05.01.2022 |
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| Publisher: | ACS Publications |
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| Year of publishing: | 2022 |
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| Number of pages: | str. 31-44 |
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| Numbering: | Vol. 33, iss. 1 |
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| Source: | ZDA |
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| PID: | 20.500.12556/DiRROS-17171  |
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| UDC: | 53 |
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| ISSN on article: | 1879-1123 |
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| DOI: | 10.1021/jasms.1c00218 |
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| COBISS.SI-ID: | 90990339 |
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| Copyright: | ©2021 The Authors |
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| Note: | Nasl. z nasl. zaslona;
Opis vira z dne 27. 12. 2021;
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| Publication date in DiRROS: | 18.10.2023 |
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| Views: | 752 |
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| Downloads: | 344 |
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| Metadata: |    |
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