20.500.12556/DiRROS-24042 Oxygen atom density in a large reactor powered by four inductively coupled plasma sources true false true Elsevier Nizozemska Angleški jezik Ni določen © 2022 The Authors. Neznano 2025-11-10 09:01:40 2025-11-10 09:01:40 2025-11-11 03:47:05 0000-00-00 00:00:00 2022 0 0 str. 110964-1-110964-7 Vol. 199 2022 0000-00-00 Zaloznikova Objavljeno NiDoloceno 2021-12-08 2022-02-17 2022-02-22 533 0042-207X 10.1016/j.vacuum.2022.110964 99387395 RAZ_Primc_Gregor_2022.pdf RAZ_Primc_Gregor_2022.pdf 1 571A9EB67A6F3D69797F82D56B821641 a38004bac59ea5a8e661e9c83abc6a431108bd09d55caeb7fca6860405b2bf8b b91e46f3-be0b-11f0-94a7-001a4af901a5 https://dirros.openscience.si/Dokument.php?lang=slv&id=35725 Institut Jožef Stefan 0 0 0