20.500.12556/DiRROS-23747 Near-surface processes of beam-sensitive materials under low energy electron irradiation We investigate the interactions and modifications induced by low-energy electron beam irradiation in beamsensitive materials, with crystalline gold trichloride (AuCl3) as a model system. Employing scanning electron microscopy (SEM) coupled with energy-dispersive X-ray spectroscopy (EDS) in an operando setup, we investigated surface and bulk transformations as a function of irradiation time (0–1080 s) and accelerating voltage (1–30 kV). Irreversible structural changes were observed both on the surface and within the bulk of the AuCl3 crystal. Surface analysis revealed the formation and growth of µm-sized vertically oriented carbon nanopillars, with voltage-dependent growth dynamics governed by backscattered (BSE) and secondary electrons (SE). At the same time, the bulk of the AuCl3 decomposed under carbon pillars, forming Au nanoparticles and near-surface voids whose size and spatial distribution correlated with the energy deposition profiles. The observed morphological and chemical alterations pose a significant obstacle to accurate chemical composition analyses by energy-dispersive X-ray spectroscopy (EDS) and suggest a narrow operating window for conducting reliable SEM analysis. beam sensitive materials electron beam interactions electron radiation gold chloride carbon deposition materiali elektronsko sevanje true false true Elsevier Nizozemska Angleški jezik Slovenski jezik © 2025 The Author(s). Neznano 2025-09-29 14:41:28 2025-09-29 14:41:28 2025-10-24 03:54:57 0000-00-00 00:00:00 2026 0 0 Nasl. z nasl. zaslona; Soavtorji: Vasyl Shvalya, Neelakandan M. Santhosh, Ardita Kurtishaj Hamzaj, Oleg Baranov, Uroš Cvelbar, Janez Zavašnik; Opis vira z dne 29. 9. 2025; str. 1-11 Vol. 716, [article no.] 164623 Jan. 2026 0000-00-00 Zaloznikova Objavljeno NiDoloceno 2025-07-30 2025-09-12 2025-09-23 53 1873-5584 10.1016/j.apsusc.2025.164623 250889219 https://www.sciencedirect.com/science/article/pii/S0169433225023396 1 a1d2f187-9d31-11f0-9bb7-001a4af901a5 https://dirros.openscience.si/Dokument.php?lang=slv&id=35198 RAZ_Hameli_Ibrahim_2026.pdf RAZ_Hameli_Ibrahim_2026.pdf 1 DC0C5BC21666733E83A820B3A41FAD12 cd770e98d850a7618ddc535cbef11b3f6c5af3c5af87a264975746dbddf03234 134e4137-9d32-11f0-9bb7-001a4af901a5 https://dirros.openscience.si/Dokument.php?lang=slv&id=35199 Institut Jožef Stefan 0 0 0