20.500.12556/DiRROS-23520 Fabrication of high-aspect ratio nanogratings for phase-based X-ray imaging Diffractive optical elements such as periodic gratings are fundamental devices in X-ray imaging – a technique that medical, material science, and security scans rely upon. Fabrication of such structures with high aspect ratios at the nanoscale creates opportunities to further advance such applications, especially in terms of relaxing X-ray source coherence requirements. This is because typical grating-based X-ray phase imaging techniques (e.g., Talbot self-imaging) require a coherence length of at least one grating period and ideally longer. In this paper, the fabrication challenges in achieving high-aspect ratio nanogratings filled with gold are addressed by a combination of laser interference and nanoimprint lithography, physical vapor deposition, metal assisted chemical etching (MACE), and electroplating. This relatively simple and cost-efficient approach is unlocked by an innovative post-MACE drying step with hexamethyldisilazane, which effectively minimizes the stiction of the nanostructures. The theoretical limits of the approach are discussed and, experimentally, X-ray nanogratings with aspect ratios >40 are demonstrated. Finally, their excellent diffractive abilities are shown when exposed to a hard (12.2 keV) monochromatic X-ray beam at a synchrotron facility, and thus potential applicability in phase-based X-ray imaging. nanogratings X-ray imaging mechanical stability nano uklonske mrežice rentgensko slikanje mehanska stabilnost true false true Wiley ZDA Angleški jezik Slovenski jezik © 2023 The Authors. Neznano 2025-09-08 10:36:16 2025-09-08 10:36:16 2025-10-24 03:54:28 0000-00-00 00:00:00 2023 0 0 Nasl. z nasl. zaslona; Soavtor iz Slovenije: Gašper Kokot; Opis vira z dne 31. 1. 2023; str. 1-9 iss. 16, [article no.] 2212660 Vol. 33 Apr. 2023 0000-00-00 Zaloznikova Objavljeno NiDoloceno 2022-11-01 0000-00-00 2023-01-26 535 1616-3028 10.1002/adfm.202212660 140183555 https://onlinelibrary.wiley.com/doi/10.1002/adfm.202212660 1 e3d32336-8c8e-11f0-9bb7-001a4af901a5 https://dirros.openscience.si/Dokument.php?lang=slv&id=34791 RAZ_Michalska_Martyna_2023.pdf RAZ_Michalska_Martyna_2023.pdf 1 668E6984C3990B84C3F8F0E37D761A25 87f4c9fa032af50734c243bea9afd20e200e5f2554be2f671ab77e92ff8bc07b 9f1cebc5-8c8f-11f0-9bb7-001a4af901a5 https://dirros.openscience.si/Dokument.php?lang=slv&id=34792 Institut Jožef Stefan 0 0 0