Near-surface processes of beam-sensitive materials under low energy electron irradiationHameli, Ibrahim (Avtor) Shvalya, Vasyl (Avtor) Santhosh, Neelakandan Marath (Avtor) Kurtishaj Hamzaj, Ardita (Avtor) Baranov, Oleg (Avtor) Cvelbar, Uroš (Avtor) Zavašnik, Janez (Avtor) beam sensitive materialselectron beam interactionselectron radiationgold chloridecarbon depositionWe investigate the interactions and modifications induced by low-energy electron beam irradiation in beamsensitive materials, with crystalline gold trichloride (AuCl3) as a model system. Employing scanning electron microscopy (SEM) coupled with energy-dispersive X-ray spectroscopy (EDS) in an operando setup, we investigated surface and bulk transformations as a function of irradiation time (0–1080 s) and accelerating voltage (1–30 kV). Irreversible structural changes were observed both on the surface and within the bulk of the AuCl3 crystal. Surface analysis revealed the formation and growth of µm-sized vertically oriented carbon nanopillars, with voltage-dependent growth dynamics governed by backscattered (BSE) and secondary electrons (SE). At the same time, the bulk of the AuCl3 decomposed under carbon pillars, forming Au nanoparticles and near-surface voids whose size and spatial distribution correlated with the energy deposition profiles. The observed morphological and chemical alterations pose a significant obstacle to accurate chemical composition analyses by energy-dispersive X-ray spectroscopy (EDS) and suggest a narrow operating window for conducting reliable SEM analysis.Elsevier20262025-09-29 14:41:28Neznano23747UDK: 53ISSN pri članku: 1873-5584DOI: 10.1016/j.apsusc.2025.164623COBISS_ID: 250889219Nizozemskasl© 2025 The Author(s).