AFM study of roughness development during ToF-SIMS depth profiling of multilayers with a ▫$Cs^+$▫ ion beam in a ▫$H_2$▫ atmosphereEkar, Jernej (Avtor) Kovač, Janez (Avtor) ACS Publications20222023-10-18 07:52:30Neznano17172UDK: 53ISSN pri članku: 0743-7463DOI: 10.1021/acs.langmuir.2c01837COBISS_ID: 128549635ZDAsl© 2022 The Authors