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<rdf:RDF xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#" xmlns:dc="http://purl.org/dc/elements/1.1/"><rdf:Description rdf:about="https://dirros.openscience.si/IzpisGradiva.php?id=17171"><dc:title>ToF-SIMS depth profiling of metal, metal oxide, and alloy multilayers in atmospheres of ▫$H_2$▫, ▫$C_2H_2$▫, CO, and ▫$O_2$▫</dc:title><dc:creator>Ekar,	Jernej	(Avtor)
	</dc:creator><dc:creator>Panjan,	Peter	(Avtor)
	</dc:creator><dc:creator>Drev,	Sandra	(Avtor)
	</dc:creator><dc:creator>Kovač,	Janez	(Avtor)
	</dc:creator><dc:subject>Ions</dc:subject><dc:subject>Layers</dc:subject><dc:subject>Mass spectrometry</dc:subject><dc:subject>Metals</dc:subject><dc:subject>Oxides</dc:subject><dc:subject>SIMS depth profiling H2 C2H2 CO and O2 atmosphere gas flooding cluster secondary ions matrix effect</dc:subject><dc:publisher>ACS Publications</dc:publisher><dc:date>2022</dc:date><dc:date>2023-10-18 07:23:46</dc:date><dc:type>Neznano</dc:type><dc:identifier>17171</dc:identifier><dc:source>ZDA</dc:source><dc:language>sl</dc:language><dc:rights>©2021 The Authors</dc:rights></rdf:Description></rdf:RDF>